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The structural and electrical properties of a c-axis-oriented BaCe0.85Ru0.05Y0.10O3−δ (BCRY) thin film on an Al2O3(0001) substrate depending on film thickness have been studied. The lattice constant of the c-axis decreases with increasing film thickness. The electrical conductivity is higher in the thin film with a small lattice constant. The activation energy (EA) of the dry BCRY thin film with a high conductivity is 0.26 eV, which corresponds to half of that of the bulk ceramic. The BCRY thin film exhibits electron–ion mixed conduction with a small EA of 0.18 eV below 400 °C in H2O atmosphere. The Ce3+ state created by oxygen vacancies, which locates at the top of the valence band, plays an important role in the electron–ion mixed conduction or proton conduction of the BCRY thin film.
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